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ELEKTRONIKA, ENERGETYKA, ELEKTROTECHNIKA ›
ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA › 2011-3
 

Publikacja: Maskless laser lithography for fast Microand Nanotechnology devices prototyping in ITE
Autor: ANDRZEJ SIERAKOWSKI  KRZYSZTOF DOMAŃSKI  PAWEŁ JANUS  PIOTR GRABIEC  TEODOR GOTSZALK  DANIEL KOPIEC  

Production of MEMS/MOEMS on silicon substrates requires specific technological sequences significantly different from those used in fabrication of Integrated Circuits (ASICs). Applications, such as transducers, AFM probes, gripers are 3- dimensional, while ASICs are located within a thin top layer of a substrate. In the case of MEMS/MOEMS the entire volume of the substrate may play an important role being a functional part of the instrument e.g. mirrors, mobile parts of an actuator, bio-cells. To produce such a type of structures, in addition to a standard technological sequence, one may use deep silicon etching processes (wet and plasma). Often used silicon <100> anisotropic etching technology leads to slant-angle sidewalls. Some applications require placing a metal path going across the sloped area. Performing photolithography makes in such a case many difficulties, mainly because of the variable resist thickness. On expanded topographies, where the sloping surfaces exist, the resist layer is thicker close to the lower edges and thinner close to the top surface. In addition, one can observe an effect of decreasing the metal path width situated close the sloping surfaces resulting from additional resist exposure by light reflected from the mirror surface <111>. During developing of a MEMS/MOEMS new application very often is necessary to test more than one option of the design. Especially photolithography processes require such a type of optimization. Vario[...]

 

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POZOSTAŁE PUBLIKACJE W TYM ZESZYCIE:
A low-cost impedance measurement technique for thick-film electronic components diagnostics
 
MARCIN W. DUDEK  KAROL NITSCH  ANDRZEJ DZIEDZIC  
Fabrication of thick-film electronic components (resistors, capacitors, varistors) involves a lot of still developing techniques: screen printing, photoforming, direct write printing, liquid ink jet printing, laser trimming etc. Different methods of production result in various electrical properties of fabricated components. Electrical impedance is the main physical parameter that fully characterize alternating current properties of electronic components. The main technique to investigate AC properties is impedance spectroscopy [1]. Full characterization of electrical properties requires wide frequency range measurements which normally need precise and expensive analyzers [2]. Simple and inexpensive Virtual Instrument setup and impedance calculation algorithms that are proposed in this paper ensure that first basic post-process quality check of fabricated thick-film structures can be obtained on place in the technological laboratory without need of high cost precise measuring devices which are always complicated to operate and needs qualified metrological personnel. Principle of measurement Basically, we can describe impedance as a complex number that represents current response for voltage perturbation (and vice-versa). For sinusoidal signal this response is seen as an amplitude change and time delay of response signal (described as an angular part of period) - Fig. 1. Using simple calculations we can transform impedance (dependent on perturbation frequency) to other useful object parameters (admittance Y(&#969;), complex capacitance C(&#969;) and electrical modulus M(&#969;)) as well as material parameters (resistivity &#961;(&#969;), conductivity &#963;(&#969;), permittivity &#949;(&#969;), and modulus m(&#969;)) - Fig. 2. Classic techniques of impedance measurement include impedance bridges or resonant bridges. First method can cover frequencies from DC to 300 MHz, second one is suitable only for frequencies higher tha[...]
 
A novel experimental setup for accelerated reliability assesment of solder and adhesive joints
 
KRZYSZTOF MAŁECKI  KRZYSZTOF URBAŃSKI  ARTUR WYMYSŁOWSKI  
A continuously growing demands for customer electronics focus on miniaturisa-tion, higher reliability and faster product commercialisation. They are fulfilled primarily through an investigation and development of new methods for assembling, packaging, and dies integration. In reality, advanced technological apparatus and materials science play here predominant role. In parallel, the strong expansion on nanotechnology introduces new polymer materials and fillers, such as nanosilver (nanoAg) or carbon nanotubes (CNT), with combination of wide spectra front-end and back-end processing, opens completely new window for application performance and usability. However, these new opportunities force an extreme challenges on whole scientist and technology communities. Although, there are several advanced techniques for materials base parameters investigation, the final assessment of materials quality and ultimate product usability can be performed by means of reliability tests, which are the most accurate way to predict time to failure of any devices and electronic components. A spectra of tests potential of developed failure and reliability investigation system (FRIS) is reported in this paper. It base on a self-developed electronic control and data acquisition system, operated with innovative setup (allowing simultaneous load of different stresses and on-line monitoring the response of subjected sample). This approach allows in depth investigation of solder and adhesive joints reliability for electronic applications. Solder and adhesive joints -reliabilllity consideration Soldering is a well-established process that has been utilized and optimized for decades. In natural consequence, soldered joints are widely used in electronic packaging to form[...]
 
A/D converter for sensor characteristics linearization
 
EDWARD HRYNKIEWICZ  
Due to the obvious fact that sensors transfer characteristics are often non-linear, it is necessity to carry-out a linearization of such characteristics. It may be done by introducing nonlinearity to a measurement transducer, by applying static converter with reverse nonlinearity to a sensor characteristic or in microprocessor system by software way or by using memory as a look-up-table converter [1, 4, 6]. But if digital signal processing is used it is necessary first to convert an analogue measured value to a digital one using A/D converter and next carried-out a linearization. Such approach is time and resources consuming. The author of this work proposes to use linearizing A/D converter for such purposes [1]. The linearization may be carried-out during conversion time what is, for instance, important for fast operating PLCs. Two types of linearizing A/D converted are considered: A/D converter with voltage-to-frequency indirect conversion and dual slope A/D converter. Both approach are suitable to use with measuring transducers. Linearizing A/D converter with intermediate U/f conversion When in measuring system an A/D converter with indirect U/f conversion is used a linearization of transducer transfer characteristic can be completed by introducing a rate multiplier [2, 5] between U/f module and a pulse counter. The programming numbers applied to a rate multiplier are set-up in such a manner that the linear relat[...]
 
Analysis of thickness influence on wettability of ITO thin films
 
MICHAL MAZUR  DAMIAN WOJCIESZAK  JAROSŁAW DOMARADZKI  KAROLINA SIERADZKA  DANUTA KACZMAREK  SHIGENG SONG  FRANK PLACIDO  BARBARA GORNICKA  
Tin doped indium oxide (ITO) thin film is a highly degenerated wide gap semiconductor with good conductivity and high optical transmission within the visible spectrum. Due to unique properties, the ITO films have many applications in solar cells, flat panel displays, sensors and organic light emitting diodes (OLED) [1,2]. Reproducible ITO films can be prepared by various methods, including reactive evaporation [3], reactive DC or RF sputtering [4], sol-gel process [5] and chemical vapor deposition (CVD) [6]. Among the mentioned methods, reactive DC or RF magnetron sputtering is the most frequently used ITO deposition methods for optoelectronic device manufacturing because of high sputtering rates that can be obtained at large area coatings [7]. Indium tin oxide coatings are suitable for a wide range of transparent EMC shielding and anti-static applications [8]. The optoelectronic and mechanical properties of ITO films are critical to the development of flexible optoelectronic devices [9]. Contact angles have great potential utility. They can be measured on a macroscopic level to characterize the average wettability of materials. Knowledge of the macroscopic contact angle for materials allows to predict whether a liquid droplet will bead up on or spread out over a solid surface. In their macroscopic use, contact angles are key in measuring the wettability of the surfaces [10]. The water contact angle is often used as a measure of surface hydrophobicity, i.e., the higher the contact angle is, the more hydrophobic the solid Analysis of thickness influence on wettability of ITO thin films (Analiza wpływu grubości na zwilżalność cienkich warstw ITO[...]
 
Ball Grid Array failure diagnosis
 
BARBARA DZIURDZIA  
Ball grid array (BGA) packages, in which connections with outside circuits are performed through solder balls under a package, has become popular in recent years. BGA packages offer a much larger I/O counts for a given footprint area on a PCB as compared to a peripherally leaded devices such as quad flat pack (QFP). They provide also improved electrical performance, e.g. a lower electrical inductance and they are much more easy to handle and assembly without the concerns of lead coplanarity and bent leads. The disadvantage of the BGA configuration is, that visual inspection and individual repair of defective solder joints is difficult. Repair and rework has to be done by removing the entire defective BGA package and replacing it with a new or a reballed one [1, 2, 3]. The paper presents the methods of BGA failure diagnosis after rework. The rework was accomplished by two methods: with professional hot air rework station and with solder paste and equipment for SMT assembly. BGA inspection is carried out by electrical continuity tests, X-ray inspection, acoustic microscopy and metallographic cross-sections. The effect of thermal shocks (&#8209;55°C, +125°C) and the sine wave vibrations in the frequency range from 20 Hz to 1,4 kHz on the BGA solder joint features is investigated. Test patterns BGA packages used in experiments were test components of BGA225T1.5C-DC15 type manufactured by the TopLine. They were 225-ball fine-pitch Plastic Ball Grid Arrays (FBGAs) with lead-free solder balls deposited on the BT (bismaleimide triazine) substrate of thickness 0.36 mm. The balls of diameter 0.76 mm and 1.5 mm pitch were made of Sn96.5Ag3.0Cu0.5 solder alloy. Fig. 1 shows the ball grid array in Hirox stereomicroscope. Fig. 2 shows the test component BGA225T1.5C-DC15 - its top view and the daisy chain loop. The BGA components were daisy chained "dummy components". Daisy chains provide information about the continuity of the BGA assem[...]
 
Characterisation of a heterojunction structure based on Au doped WO3 and SnO2
 
PATRYK HALEK  HELENA TETERYCZ  MARTA FIEDOT  KAMIL WIŚNIEWSKI  
Gas and humidity sensors based on semiconductor metal oxides and solid electrolytes have been studied extensively during the last few decades. The main work in this area is aimed at improving the basic parameters of these sensors to achieve better sensing performance. Nowadays there are a variety of commercial available sensors. Nonetheless it has not been possible to make a highly selective and sensitive sensor with fast response time. The presence of various gases or water vapour in the atmosphere affects the sensor performance and influence the output signal. Semiconductor gas sensors show poor selectivity, which makes them insensitive to low gas concentrations. Several methods have been found to overcome this problem. The most frequently used methods are the modulation of the working temperature of the sensing structures and the application of new materials with improved catalytic properties [1, 2]. Another option is the construction of semiconductor gas sensors based on a heterojunction formed between different metal oxides. The analysis of reactions occurring in the single phase materials and at the junction can improve the selectivity and sensitivity of such structures. For the first time this class of devices was used as humidity sensors. For the application in measurement systems, both p-n and n-n junctions were propsed by authors [3-5]. In this paper we study[...]
 
Characterization of mos structures with ultrathin insulator layer by means of a theoretical model
 
BOGDAN MAJKUSIAK  
Thickness of the gate oxide layers in the metal-oxide-semiconductor structures in the most advanced technologies has reached the range of a single nanometer and further scaling requires replacement of SiO2 by material of high electric permittivity because of the flow of unacceptable tunnel leakage current. Tunnel leakage affects also the admittance of the MOS capacitor which serves as the basic characterization and diagnostics tool. The aim of this work is to study the effect of the tunnel leakage on the capacitance and conductance - two components of the simplest small-signal equivalent circuits of the MOS structure. These quantities are computed with the use of a theoretical model. Conclusions from the theoretical considerations are reviewed for measurements of the fabricated Al-SiO2-Si capacitor. Small-signal equivalent circuit Fig. 1 shows a simple small-signal equivalent circuit of an MOS structure, which this study is based on. The capacitance CMOS representing an idealized MOS structure is shorted by the leakage conductance GL (resistance RL) reflecting tunneling through the insulator layer, and is connected with the series resistance RS representing the spreading resistance of the semiconductor substrate and the contact resistance. Simple transformations lead to relations between elements of the equivalent circuit shown in [...]
 
Electrocatalytic gas sensor with non-triangular excitation
 
GRZEGORZ JASIŃSKI  ANNA STRZELCZYK  BOGDAN CHACHULSKI  PIOTR JASIŃSKI  
In recent years, solid state ion conducting materials have been intensively developed. These materials have a relatively high ionic conductivity based on a single predominantly conducting anion or cation species and have negligibly small electronic conductivity. Typically, useful solid electrolytes exhibit ionic conductivities from 10-1 to 10-5 S/cm at room temperature. Solid state electrolytes exhibit a potential for application in a variety of solid state electrochemical devices such as fuel cells, batteries, membranes, pumps and sensors [1]. Gas sensors are one of the most critical and rapidly growing areas in modern solid electrolyte technology. Solid state gas sensors are cost effective, small, rugged and reliable [2, 3]. Usually electrochemical solid state sensors operate in either potentiometric or amperometric mode [4, 5]. A lack of selectivity is sometimes a shortcoming of such sensors. It seems that improvements of selectivity can be obtained in case of the electrocatalytic sensors. Their working principle is based on acquisition of an electric current, while voltage ramp is applied to the sensor. The current-voltage response depends in a unique way on the type and concentration of ambient gas. In case of electrocatalytic gas sensors usually a linearly changing voltage excitation signal of symmetrical triangular shape in range from 5 to -5 V is applied to the sensors terminals [6]. The voltage sweep rate is adjusted to 50 mV/s. This, originated from liquid electrochemistry, method has some shortcomings. In typical conditions, one measuring cycle takes up to 7 min. Stable response is obtained most often after 2 or more cycles, thus extending measuring time even further. Long measuring time can limit application of electrocatalytic sensors in environments with fast gas concentration changes. In th[...]
 
Environment for automated low-temperature measurements of electronic circuits
 
FRANCISZEK BALIK  WOJCIECH SOMMER  
The aim of this work was to develop an environment which would allow us to perform automated measurements of electronic circuits and elements characterization in low-temperature conditions. For instance, the characteristics of transistor or integrated amplifiers, or thick-film resistor parameters can be measured by using this system in wide temperature range. Hitherto, cryostat automatic systems have been mainly developed for chemical material measurements in low-temperatures. The physical properties of such materials were tested in cryogenic temperatures, for instance, molecular magnetic or superconducting properties were examined for newly invented chemical compounds [1, 2]. Some of these systems worked under RS bus and computer Visual Basic programs control [1, 3] or were supplied with specialized control programs. In general, the cryostat systems can be divided on four groups [4]: 1. Dipper probes, 2. Liquid-flow cryostats, 3. Gas-flow cryostats, and 4. Cryocoolers. The dipper probe is the simplest type of cryostat, in which the test sample is mounted on a copper block at the end of a low-thermal-conductivity tube placed above the cryogenic liquid surface in a storage Dewar. By varying the height of the sample-probe above the liquid surface, the sample-holder temperature can be varied. This kind of cryostat sometimes can suffer from collecting ice on probe tube and making the sample temperature instability. The test sample in the liquid-flow cryostat is thermally mounted on a copper cold plate inside a container. The cold plate is cooled by continuously transferring a liquid cryogen from a supply Dewar to the cold plate. The temperature of the cold plate is set near the desired temperature by adjusting the flow rate of cryogen. This kind of cryostat can cover temperature range: 4-300K, and temperature can be controlled typically to within about +/-2 mK. The gas-flow type cryostat is some modification of the previous[...]
 
Etching of Si(100) and (110) substrates in KOH solutions saturated and son-saturated with isopropyl alcohol
 
KRZYSZTOF ROLA  IRENA ZUBEL  MAŁGORZATA KRAMKOWSKA  
Anisotropic etching of silicon is commonly used to fabricate spatial MEMS and MOEMS structures applied in micromechanics and optoelectronics. The most popular are KOH and TMAH solutions, both pure as well as containing different alcohol or surfactant additives. The additives to the basic solutions change the etching anisotropy and cause some reduction of etch rates of several crystallographic planes, like (110), (331) and (221) what is used to reduce the convex corners undercut. The solution of KOH with isopropyl alcohol (IPA) is currently the most frequently used in silicon anisotropic etching. The process is usually carried out in the solutions saturated with IPA since it guarantees stability of the solution composition and the best morphology of (100) plane which is the most commonly used in micromechanical devices [1]. In the paper, the results of etching in KOH solutions with IPA content below saturation are compared with the results of etching in KOH solutions saturated with IPA. The analysis of the etching process in these solutions may be useful for explaining the etching mechanism. Etching in KOH solutions saturated with isopropyl alcohol The etching experiments were carried out in a thermostated vessel at the temperature of 75&#186;C, with the use of mechanical stirring. The etching rates of (100) and (110) planes obtained in KOH and KOH saturated with IPA solutions are shown in Figs. 1 and 2. The morphologies of the surfaces obtained after the etching are shown in Figs. 3 and 4. The obtained results show that in pure KOH solutions with the concentration exceeding 7 mol, smooth Si (100) surfaces, etched with the Fig. 1. Etch rates of the silicon substrates Rys. 1. Szybkości trawienia podłoży 2 4 6 8 10 12 0,5 0,6 0,7 0,8 0,9 1,0 1,1 etch rate [um/min] KOH concentration [M] (100) KOH (100) KOH+IPA 2 4 6 8 10 12 0,0 0,2 0,4 0,6 0,8 1,0 1,2 1,4 1,6 etch rate [um/min] KOH concentration [M] (110) [...]
 
Fabrication of through-holes in GaAs substrates for device applications
 
IRENA ZUBEL  PMAŁGORZATA KRAMKOWSKA  IWONA ZBOROWSKA-LINDERT  
Device structures on AIIIBV substrates (MESFETs, p-HEMT, integrated circuits MIMICs), intended for the operation at high power and high frequency range, require specific conditions of heat dissipation and minimizing of parasitic capacities and resistances, which affect their electrical performance and response time. Reduction of dimensions, including reduction of substrate thickness, in order to obtain higher integration level is also very important. To fulfill the mentioned requirements, via-type connections, giving the possibility to produce contacts from the backside of the substrate, are created. Such connections facilitate heat dissipation and reduce substrate impedance of high frequency devices. They are widely used in silicon technology, though in the case of AIIIBV compounds, are not so popular. The fact follows probably from much more complex technological process, which is involved in their fabrication. Some examples of implementation of the technology in GaAs sensor applications will be also discussed at the end of this paper. Designing of technological process Theoretical considerations Accomplishment of via-type connections for semiconductor structures made on epitaxial layers of AIIIBV compounds by wet chemical etching imposes many technological problems. They include: thinning of substrates, etching of a hole itself, stopping of etching process at an etch-stop layer. Chemical etching of the holes with micrometric dimensions in the wafer with a typical thickness of few hundred micrometers could result in significant undercut of the etching mask and remarkable extension of the hole size (the lateral underetching is usually comparable with the etching depth). To assure appropriate miniaturization, preliminary thinning of the wafer is necessary. Uchiyama et al [1] employed mechanical grinding and polishing to thin the backside of the wafer up to 30 &#956;m. We have used wet chemical etching for this purpose. App[...]
 
Fotonika i Inżynieria Internetu
 
RYSZARD ROMANIUK  
Fotonika, zaawansowane systemy elektroniczne oraz inżynieria Internetu rozwijają się w kraju intensywnie, głównie na terenie uczelni i w instytutach badawczo-rozwojowych. Zapotrzebowanie na specjalistów inżynierów w zakresie zaawansowanego sprzętu i oprogramowania systematycznie wzrasta w kraju. Tradycyjne, XXVII Sympozjum Zespołu Naukowego PERG/ ELHEP z Instytutu Systemów Elektronicznych WEiTI Politechniki Warszawskiej odbyło się w dniach 4-5 lutego 2011 r. na terenie Wydziału Elektroniki i Technik Informacyjnych PW. Patronami Sympozjum są: WEiTI PW, IEEE, SPIE, Komitet EiT PAN oraz Polskie Stowarzyszenie Fotoniczne. W Sympozjum wzięło udział ok. 60 osób, głównie magistrantów i doktorantów PW oraz z współpracujących instytucji jak: IFD UW, IPJ, IFPiLM, ZFT PAN oraz CBK PAN. Wygłoszono kilkadziesiąt prezentacji naukowych dokumentujących postęp w pracach wykonywanych przez młodych naukowców na rzecz prowadzonych projektów badawczych, a także prac inżynierskich, magisterskich i doktorskich. Sympozjum obejmowało następujące sesje: IT w medycynie, eksperymenty fizyki wysokich energii, inżynieria/ elektronika kosmiczna, czujniki sCCD i techniki obrazowania ultra-nisko-szumnego w pasmach optycznych i IR, nowe rozwiązania kart elektroniki z procesorami FPGA-DSP, efektywne komponentowe metody [...]
 
Further improvement of Pb/Cd-free CaRuO3 thick-film resistors
 
ADAM WITOLD STADLER  ZBIGNIEW ZAWIŚLAK  ANDRZEJ KOLEK  KONRAD RAFAŁ KIEŁBASIŃSKI  MAŁGORZATA JAKUBOWSKA  
Thick-film resistors (TFRs) are very popular in many fields of electronics. They are typically made from pastes containing conducting (RuO2, Bi2Ru2O7 or CaRuO3) and Pb-containing glass components as well as organic vehicle, which are screen-printed on substrates and then fired in low or high temperature processes. TFRs gained many proponents over years of their usage, due to their advantages, as cheap technology, good performance parameters, and easy control of sheet resistance. On the other hand, RuO2-based resistors enter very demanding field of temperature sensing in cryogenics. Novel technique called printing electronics, in conjunction with eco-friendly materials, opens new page and makes thick-film technology still perspective. However, it implies design of new materials, like Pb/Cd-free solders and pastes for TFRs, what is challenge for technologists who have to develop new generation of materials. For example, well known and widely used in TFRs fabrication RuO2-based resistive pastes include lead-borosilicate glass and therefore they do not fulfill RoHS directive and have to be replaced with their Pb/Cd-free counterparts. Unfortunately, in spite of great effort, Pb/Cd-free TFRs are still at the explorative stage [1-5]. However, first attempts, suggest that CaRuO3 better works with Pb/Cd-free glasses [4] and therefore it is more promising conducting component than widely used RuO2. On the other hand, currently Pb/Cd-free CaRuO3-based TFRs are noisier than Pb/Cd-free RuO2-based or Pb-containing TFRs and form bad interface at least with Pb/Cd-free AgPd-based, contacts [6]. In this work we present our new results concerning studies of electrical properties of Pb/Cd-free CaRuO3-based TFRs. The innovation is that the resistive paste was made of the conducting component which is the mixture 1:1 of CaRuO3 and RuO2 powders. Resistance vs. temperature measurements and low-frequency noise spectroscopy methods have been applie[...]
 
Hall Mobility in 4H-SiC, measurements and Monte Carlo simulation
 
JANUSZ WOŹNY  GESUALDO DONNARUMMA  ZBIGNIEW LISIK  
Silicon Carbide is used as material for electronics working in difficult conditions (temperature, power densities, high speed). Although its technology can be almost considered as matured commercial CAD tools e.g. like Sentaurus TCAD suffer from not-well established models, e.g. lack of robust model for breakdown modelling [1]. Also parameters of the models are not measured as accurate as for silicon. For instance drift velocity values are mostly quoted only from Khan and Cooper measurements [2]. Knowledge about material parameters for wide range of environmental conditions (various temperatures, electric fields, etc ...) is required for proper functioning of CAD tools. One way of retrieving the values is to do measurements which is impossible for all combination of environmental variables. Second possibility is to use very accurate models and obtain macroscopic parameters from simulation. Here we use the Monte Carlo approach to obtain Hall mobility for 4H-SiC. Results were verified with measurements done with Van Der Pauw method. Good accuracy of modelling was observed thus the Monte Carlo simulations can be seen as a[...]
 
Humidity sensor made by ink-jet printing technology
 
JERZY WEREMCZUK  GRZEGORZ TARAPATA  ROMAN IWASZKO  DANIEL PACZESNY  RYSZARD JACHOWICZ  
The ink-jet printing technology seems to be very promising for all: small, medium and large volume production of cheap sensors dedicated for applications of everyday life like smart packaging, smart textiles, smart labels, etc. To achieve this goal new technologies and materials compatible with ink-jet printing and offset printing should be developed. Presented in the paper humidity sensor was made with the usage of ink-jet technology (Dimatix DMP 2831). In comparison to the sensors reported in the literature [1,2] complicated silk screen printing was eliminated. Printing technology The Dimatix DMP 2831 printer is capable to print with different solutions using MEMS piezoelectric printing head equipped with 16 nozzles of diameter and pitch of 21,5 and 254 &#956;m respectively. Typically droplet volume is of 10pl (Fig. 1). To avoid nozzles clogging a 200 nm mesh filter was applied. Each nozzle could be controlled separately and trimmed by changing of its supplying voltage (16&#8230;40 V) to achieve uniform droplets. The printed dot diameter was about 42 &#956;m, therefore it was decided to use 30 &#956;m printing resolution (both X and Y direction) to have a dot overlapping to gain tracks continuity. Sensor construction The humidity sensor was designed in a form of interdigitated electrodes covered by humidity sensitive layer (Fig. 2). It was designed two types of sensor differing each other electrodes widths: 200 and 100 &#956;m respectively. The gap between the electrodes was of 100 &#956;m. Each comb ele[...]
 
IGBT static model based on diffusion equation implemented in SPICE source code
 
ŁUKASZ STARZAK  ANDRZEJ NAPIERALSKI  
Bipolar power semiconductor devices, such as the PIN diode or the Insulated Gate Bipolar Transistor (IGBT), have the advantage of low voltage drop at high current densities. This is achieved through introduction of excess carriers into the wide, lightly doped base layer which is necessary for obtaining high voltage capability. A power semiconductor device is normally used as a switch. Bipolar power device switching takes more time and involves physical phenomena more complex than in the case of unipolar devices such as the power MOSFET. Thus, excess carriers influence strongly static and dynamic properties of the device. This causes problems when the device is used in a circuit but also makes its modelling more troublesome [1]. Motivation Power semiconductor device models presently fall into one of the following two categories. 1. Full physical models are based on microscopic description of physical phenomena and take into account the dimensions of the semiconductor structure. They are very accurate, yet not accessible to the average electronic engineer. They need special, multidimensional simulators that are costly and need special skills to be used. Moreover, geometrical and physical parameters must be known that are obviously not made available by device manufacturers. 2. In the widely used electronic circuit simulators, compact behavioural models are used. They are easy to use for circuit designers but yield inaccurate or even erroneous results. This is because they are either models of signal-oriented devices (as opposed to power-oriented ones) developed for the needs of VLSI circuit design,[...]
 
Implementation of FD SOI CMOS technology in ITE
 
KRZYSZTOF KUCHARSKI  CHRISTIAN RENAUX  ANDRÉ CRAHAY  PIOTR GRABIEC  MIROSŁAW GRODNER  TOMASZ BIENIEK  ANDRZEJ PANAS  ANDRZEJ SIERAKOWSKI  HELENA KŁOS  DANIEL TOMASZEWSKI  DARIUSZ OBRĘBSKI  JACEK MARCZEWSKi  DENIS FLANDRE  
Fully-depleted silicon-on-insulator (FD SOI) CMOS technology is widely used for fabrication of low-power, low-voltage CMOS integrated circuits (ICs) [1]. Interest in SOI CMOS technology in ITE dates to the late 90s. Different aspects of SOI technology have been considered, e.g. modelling of PD SOI MOSFETs, as well as integration of CMOS on thick SOI substrates with p-n junction based detectors of ionizing radiation [2, 3]. Recent works also comprise development of FinFET-type devices for application as chemical detectors [4]. Thus a variety of SOI CMOS technologies are under continuous development. These applications, except for the FinFET-based one, have not taken advantages of FD SOI technology: better channel operation control by gate voltage, better subthreshold I-V characteristics, lower p-n junction area and capacitance, thus lower leakage, power consumption and higher speed, as well as wider range of temperature operation. In order to fill this gap, a collaboration with UCL has been undertaken, and supported by TRIADE project [5]. The collaboration aims at transferring the FD SOI CMOS technology, originally developed at UCL [1], to ITE. Main features of this process are as follows: supply voltage 3 V, threshold voltage 0.3 V, and min poly-silicon gate width 1.5 &#956;m. In the sections below issues related to the task mentioned above are reported. SOI substrates A recommended method for fabrication of high-quality 4-inch SOI substrates (requirement of ITE facilities) consists in laser cutting of the 200 mm UNIBOND SOI wafers manufactured originally by SOITEC. At present they represent the top quality with respect to thin silicon layer properties (crystallography, Si/SiO2 interface quality, thickness, and its uniformity), which are very relevant for manufacturing of the FD SOI CMOS devices. Method and equipment for laser cutting of 200 mm wafers have been developed in ITE. In Fig.1. the way, in which the 200 mm SOI U[...]
 
Influence of Selected Constructional and Technological Factors on Tolerance and Stability of Thin-Film Resistors Embedded in PCBs
 
WOJCIECH STĘPLEWSKI  JANUSZ BORECKI  GRAŻYNA KOZIOŁ  ANETA ARAŹNA  ANDRZEJ DZIEDZIC  PIOTR MARKOWSKI  
In the study the OhmegaPly? material was selected to forming resistors. The commercial available material is produced by deposition the resistive layer (Ni-P) on copper foil and lamination onto FR4 material. Resistivity of Ni-P layer depends on thickness of this layer and can be in range from 10 &#937;/&#9633; to 250 &#937;/&#9633;. In the investigation it was used material with sheet resistance of 25 &#937;/&#9633; (thickness - 0.4 &#956;m) and 100 &#937;/&#9633; (thickness - 0.1 &#956;m). Thin-film character of the resistor cause that it can be embedded inside of PCB without increasing its thickness. The other advantage is that embedded resistor is not assembled in the contrast to conventional element so the number of component solder joints will decrease and this can improve reliability of final product. However, the resistive layer is very thin and simultaneously it has very rough surface (Fig. 1). It can be the reason that the thin-film resistive layer is sensitive to mechanical factors (scratch, stress during lamination) and also on chemicals that are used in PCB manufacturing process. Influence of crucial constructional factors such as size, shape and resistors orientation as well as technological parameters of resistor forming process and PCB manufacturing process on the tolerance and stability of embedded resistor parameters was assessed. The experiments were carried out both in the laboratory and on technological line at Tele and Radio Research Institute. The Sequential Build Up technology was applied to manufacture PCBs with thin-film embedded resistors. The results revealed that some factors can accumulate or neutralize each other influence on the final value of resistance also in dependence on the existing manufacturing processes and production facilities. The knowledge on changes in resistors properties introduced by individual parameters of the design and technological processes is a crucial issue before intr[...]
 
Investigation of inkjet technology for printed organic electronics
 
JANUSZ SITEK  KONRAD FUTERA  KAMIL JANECZEK  KRYSTYNA BUKAT  WOJCIECH STĘPLEWSKI  MAREK KOŚCIELSKI  MAŁGORZATA JAKUBOWSKA  
The new fields of applications are now opened up thanks to organic electronics. This technology is combination of new material and cost-effective printing processes and enables manufacture of low cost, light-weight and flexible devices in single process. Flexible solar cells, printed batteries, screens printed on paper are only examples of promising application for this new technology. The most important property of organic electronic is its &#8220;flexibility". This feature unable use in production of cost-effective techniques, such as roll-to-roll, that require expensive tools but give us very high efficiency in large scale production. Organic electronic can be also manufactured using smaller and lower cost inkjet printers. That can be used in small companies and research institutes. Inkjet printers can lower the cost of prototypes and small series, because no other tools are necessary. Paper presents the self build inkjet printer system as well as results of manufacturing electronic elements on different substrates. Structures were characterized from the point of shape of surface and geometry. The PEDOT:PSS and nanosilver inks were used in investigations. INKJET printer for organic electronics The investigations were carried out on self build inkjet printer system. The printer was based on MicroDrop piezoelectri[...]
 
Laser micromachined LTCC gas sensors
 
ADAM BIEŃKOWSKI  JANINA GAUDYN  KRZYSZTOF ZARASKA  ARTUR RYDOSZ  WOJCIECH MAZIARZ  KAROL MALECHA  
The low temperature co-fired ceramics (LTCC) is a well known technology used to produce multichip ceramic modules. This technology is mostly used for production of microwave devices and hybrid integrated circuits [1]. Recently, LTCC was also applied for the production of sensors and microsystems [1-4] thanks to its very good electrical and mechanical properties, high reliability and stability as well as possibility of making three-dimensional structures. This is a continuation of earlier work on this subject [2]. Our aim was to further reduce the size of the sensor. Smaller size of the sensor would decrease its heat capacity thus reducing power consumption. The gas sensor substrates described in this paper will be used with gas sensitive layers based on nanopowders and nanotubes. These materials are now under development. Design The sensor consists of 3 layers of Heraeus CT700 tape (200 &#956;m thickness) with 3 mm diameter (after firing). On the b[...]
 
Laser patterning of coloured green ceramic tapes
 
KAROL MALECHA  DOMINIK JURKÓW  JOHANNA STIERNSTEDT  LESZEK GOLONKA  
HTCC (High Temperature Cofired Ceramics) and LTCC (Low Temperature Cofired Ceramics) technologies have been developed for many years. Both techniques enable fabrication of MCM-C (Ceramic Multi Chip Modules) devices [1]. Moreover, various sensors, actuators and microsystems can be utilized with these technologies [2-5]. Design flow of both methods consists of: tape preparation, vias and shapes forming, conductive tracks and passive elements deposition, stacking, lamination, cofiring and post processing [6]. A traditional LTCC structure consists of several (or more) dielectric tapes, connecting vias, surface and buried conducting lines and passive components (resistors, capacitors, inductors). The conductors and passive components are deposited on ceramic tape using standard screen-printing or ink-jet printing method. After deposition process all green ceramic tapes are stacked together in proper order and burnlaminated using an isostatic or uniaxial press with a pressure of 5-30 MPa at temperature 40-90oC for time up to 30 minutes. Then the ceramic module is cofired in air in special thermal profile with a maximum temperature of 850oC (for LTCC) or 1600oC (for HTCC). Afterwards active and passive components can be added on the ceramic module&#8217;s surface using standard SMT (Surface Mounting Technology) or flip-chip techniques. Three main techniques of vias and three-dimensional structuring of green ceramic tape are recently utilised: laser pattering [7,8], hot embossing [9] and mechanical punching [10]. The laser cutting is the most flexible method. It is used in low mass production and in fast prototyping processes. However, the cutting quality depends strongly on laser light absorption by the green ceramic tape. Absorption depends on laser frequency, tape composition and colour. Moreover, laser power and beam velocity affect the cutting[...]
 
LTCC wireless module
 
LESZEK GOLONKA  ZBIGNIEW IANELLI  HENRYK ROGUSZCZAK  JANUSZ SZTAJER  PIOTR WOJTAS  PRZEMYSŁAW WISZNIOWSKI  DARIUSZ BABECKI  
The LTCC (Low Temperature Cofired Ceramics) has been used for many years to produce a multilayer substrate MCM (Multichip Module) due to its very good electrical and mechanical properties, high reliability and stability as well as possibility of making three dimensional (3D) integrated microstructures containing passive components [1-3]. This technology can also be applied for the production of sensors, actuators and microsystems integrated with wireless modules. Implementation of modern LTCC technology together with the advanced assembly techniques of electronic components allows a significant miniaturisation of final product with increased performance and reliability. LTCC electronic systems can work in the highest frequency ranges of radio waves covering millimetre waves or shorter. The LTCC modules containing modern wireless communication systems based on TN100 semiconductor manufactured by the STMicroeletronic are investigated. The system operates in the licence free 2.4 GHz ISM band and allows creation of self-organizing and self-localizing networks. It uses world-wide standardized communication technology based on chirp modulation (CSS-Chirp Spread Spectrum). Extensive tests of the LTCC wireless systems have been carrie[...]
 
Mikrokontrolery PIC w zastosowaniach badawczych Część 3: Obsługa alfanumerycznego wyświetlacza LCD. Przerwania. Przerwanie zewnętrzne INT/RB0. Timer0. Częstotliwościomierz
 
PAWEŁ BORKOWSKI  
Najbliższe 2 części kursu posłużą nam do skonstruowania urządzenia zliczającego liczbę wystąpienia zjawiska w danym czasie. Oczywiście chodzi o zjawiska, których czas trwania liczony jest w mili- i mikrosekundach, co uniemożliwia bezpośrednią obserwację. Zakładając że zjawisko występuje w sposób okresowy, będziemy dążyć do budowy częstotliwościomierza. Czym będą różniły się nasze projekty od wielu podobnych funkcjonujących w literaturze? Nasz częstotliwościomierz zostanie zbudowany bez konieczności użycia dodatkowego oprzyrządowania, a wszystkie jego funkcje zostaną zaimplementowane w sposób programowy. Przy tym, jak się okaże, jego dokładność będzie zaskakująco duża. Wyniki będą wyświetlane na alfanumerycznym wyświetlaczu LCD. Z powyższego wynika, że w pierwszej kolejności musimy nauczyć się obsługiwać wyświetlacz LCD. Schemat prezentujący najprostsze podłączenie alfanumerycznego wyświetlacza LCD do mikrokontrolera PIC16F84A przedstawia rys. 1. Linia V0 służy do nastawy kontrastu. Jej bezpośrednie podłączenie do masy wymusza wyświetlanie znaków maksymalnie nasyconych czernią. Natomiast linia RW służy do konfigurowania kierunku przepływu danych. Wysoki stan logiczny na linii RW umożliwia odczytanie danych z pamięci wyświetlacza LCD, zaś wyzerowanie linii pozwala tę pamięć zapisywać. Ponieważ tylko ten drugi rodzaj obsługi pamięci wyświetlacza LCD będzie nas interesował, linię RW podłączyliśmy do masy. Kompilator mikroC PRO for PIC został wyposażony w bibliotekę obsługi alfanumerycznych wyświetlaczy LCD, co znacznie ułatwia proces programowania. Aby móc skorzystać z funkcji biblioteki, musimy przede wszystkim zdefiniować połączenie wyświetlacza z mikrokontrolerem. //połączenia LCD z mikrokontrolerem sbit LCD_RS at RB4_bit; sbit LCD_EN at RB5_bit; sbit LCD_D4 at RB0_bit; sbit LCD_D5 at RB1_bit; sbit LCD_D6 at RB2_bit; sbit LCD_D7 at RB3_bit; //konfiguracja portu obsługującego LCD sbit LCD_RS_Direction at TRISB4_bit; s[...]
 
Mobile Safety System for the Blind
 
KRZYSZTOF BOROŃ  WOJCIECH GELMUDA  ANDRZEJ KOS  
There are many devices on the market that help the visual impaired people to walk in unknown urban environment [1- 4]. Numerous research and tests have been carried out in Special Educational Centre for Blind and Partially Sighted Children in Kraków. The results show there is still one major problem that needs to be solved. This problem concerns holes and road excavations in the ground and small yet very dangerous hanging obstacles which a blind person can encounter - Fig. 1. A device has to be designed to help the visual impaired people deal with the types of dangerous situations mentioned above There are devices designed especially for the visual impaired people that inform them about some obstacles and free space; for instance one device can inform if a seat in a train is occupied or not or if an elevator door is open or not. However, there is no such a device that could inform about holes and road excavations, especially the ones that have recently occurred on a daily road from a blind person&#8217;s home to their work place, damages in stairs or open space between an edge of a train platform and tracks [5]. Holes and road excavations are usually marked but it is very hard for blind people to spot and detect them. That is why any road hole is a serious danger for them. With some help of an electronic device for blind people or just a simple white stick, a blind person is able to determine if there is a hole ahead. But the problem is th[...]
 
Model of high rate reactive pulsed magnetron sputtering
 
KATARZYNA TADASZAK  WITOLD M. POSADOWSKI  
Several models have been developed to describe reactive magnetron sputtering process. Most of them were based on the classical model derived by Berg et al. [1], which is mainly focused on the target surface condition influence. However, the deposition mechanism is complicated and could not be precisely described with simple analysis of sputtered surface. It requires also studies of collecting area state, plasma properties, particle transport, etc. The deposition of aluminium oxide can be successfully used to illustrate the sputtering process. Aluminium and aluminium oxide differs strongly in regard to emission and sputtering properties. The sputtering yield of Al2O3 is lower than Al, thus with progressing oxidation of the target deposition rate is decreasing. On the other hand, aluminium oxide has two times higher ion induced secondary electron emission coefficient, what indicates increase of emission and changes of plasma impedance. Those properties make aluminium an ideal material for illustrating mechanisms which influence on reactive sputtering process. Experimental details With reference to the Berg&#8217;s model, high rate reactive pulsed magnetron sputtering of the aluminium target in argon and oxygen gas mixtures has been studied. High quality dielectric layers were deposited with use of the DPS pulsed power supply and the special construction of magnetron source [2, 3]. The magnetron source WMK-50 equipped with a 50 mm diameter and 7 mm thick aluminium target was used during the experiments. Substrate to target distance was dS-T= 75 mm. The available maximum target power density was about 1000 W/cm2 (however not used in this experiment). The process has been performed in a vacuum system equipped with a rotary and diffusion pump with a pumping speed of 2000 l/s. The final pressure of the deposition chamber was about 2 mPa. All experiments were performed in atmosphere of argon and oxygen gas mixture with total press[...]
 
Modeling the ballistic and tunnel source-drain currents in Silicon Nanowire MOSFETs
 
ANNA SAWICKA  BOGDAN MAJKUSIAK  TATSUHIRO NUMATA  SHIGEYASU UNO  GENNADY MILNIKOV  NOBUYA MORI  
Silicon nanowire MOSFETs due to excellent controllability of the channel by the gate electrode are promising as next generation device structures for further CMOS scaling. Nanowire MOSFETs have been extensively investigated and both compact and numerical models of ballistic current have been reported [1, 2]. However, modelling of only the ballistic component of the current is not sufficient. If the channel is short enough, the tunnel component becomes significant. Silicon nanowire MOSFET structure We assume a simple square cross section Si nanowire N-MOSFET structure (Fig. 1) with an intrinsic channel, midgap gate and SiO2 as a gate dielectric, source and drain doping concentration ND = 10 20 cm-3. Due to strong quantum confinement in a very narrow (3&#8230;5 nm) nanowire cross section, transport occurs along onedimensional subbands. The 1D subbands profiles for all six silicon energy valleys and for the lowest quantum numbers were extracted from results of the NEGF simulations and the transfer matrix (TM) method was applied to calculate the source-drain current. Ballistic current was calculated by integrating current contributions for energies above the top of the potential bar[...]
 
Modeling the charge trapping effect in high-K gate stacks on the tunnel current
 
ANDRZEJ MAZURAK  BOGDAN MAJKUSIAK  
High-K dielectrics play a key role in the present MOS technology scaling. One of the obstacles to overcome scaling barriers is improvement of the electrical quality of the substrate- oxide interface and dielectric quality in respect to the space distributed charges. Electrically active traps influence significantly the device electrical characteristics. In this work we discuss an influence of distributed charges in the gate stack on the current-voltage characteristics of the MOS structure. Quantum well trap model A charge trap is modeled as a quantum well of thickness in the range of a few angstroms (Fig. 1). Position of the Fermi level in the quantum well in respect to the substrate corresponds to charging of a trap due to the tunneling and the thermal recombination- generation processes. The tunneling probability is calculated with the use of the transfer matrix method with inclusion of carrier scattering in the well [1]. The scattering rate parameter moderates the impact of the trap on the current transport. High-K gate stack with charges trapped model The modeled gate stack consists of the interfacial SiO2 layer and a high-K dielectric layer. The high-K layer is divided into sections. The trapped charge is modeled as effective charge located at the interlayer planes. For tunneling probability through the multilayer g[...]
 
Oscylator harmoniczny sterowany cyfrowo projektowany w oparciu o transmitancje wzmacniaczy operacyjnych
 
MIROSŁAW PŁAZA  
Oscylatory są układami elektronicznymi wytwarzającymi przebiegi elektryczne o określonym kształcie i niegasnące z upływem czasu. Są one niezbędnymi podzespołami niemal każdego bardziej złożonego urządzenia elektronicznego, ponieważ poza oczywistymi przypadkami generatorów sygnałowych, funkcyjnych lub impulsowych, zastosowanie źródła drgań okresowych konieczne jest prawie w każdym przyrządzie działającym cyklicznie, inicjującym pomiary lub procesy technologiczne oraz którego działanie wymaga okresowej zmiany stanów [1, 2]. Ze względu na bardzo szeroki obszar możliwych zastosowań obwodów oscylatorów problematyka ta jest fundamentalną sprawą w rozwoju wielu gałęzi współczesnej nauki i techniki. Publikowane w ostatnich latach prace z zakresu projektowania i analizy obwodów oscylatorów [3-5] skupiają się głównie na eliminacji biernych elementów zewnętrznych oraz zastępowaniu ich inercyjnymi elementami aktywnymi. Zastąpienie np. zewnętrznych biernych pojemności wzmacniaczami operacyjnymi wpływa na poszerzenie pasma przenoszenia sygnałów wyjściowych [6]. Zagadnienie eliminacji biernych elementów zewnętrznych oraz zastępowanie ich elementami aktywnymi jest bardzo często poruszane również w kontekście innych niż oscylatory układów elektronicznych. Główny kierunek jaki należy tu wyróżnić [7-9] dotyczy projektowania i analizy układów filtrów aktywnych. W niektórych pracach na ten temat projektowane filtry uzupełniane są o układy sterujące, dzięki którym uzyskuje się możliwości cyfrowego strojenia ich parametrów (np. wartości częstotliwości granicznej lub wartości wzmocnienia). W pracach [10, 11] zmiany parametrów oscylatorów realizowane były poprzez odpowiednie zmiany wartości stosowanych elementów biernych (rezystorów). Bieżąca literatura jedynie w niewielu przypadkach [12] wspomina zagadnienie, jakim jest możliwość cyfrowego przestrajania parametrów oscylatorów. Uzupełniając układy os[...]
 
Properties of thick-film photoimageable inks for LTCC substrates
 
PIOTR MARKOWSKI  MAŁGORZATA JAKUBOWSKA  ELŻBIETA ZWIERKOWSKA  MARTA DANIELKIEWICZ  KLAUS JURGEN WOLTER  MARCO LUNIAK  
Miniaturization of electronic circuits is strongly associated with miniaturization of conductive paths and pads. It also refers to thick-film technology. Fabrication of details narrower than 150 &#956;m by using of standard screen-printing is very difficult task. There are few more precise techniques - for example photoimageable inks method [1, 2]. It enables to create even several-micrometers wide paths. The inks prepared at Institute of Electronic Materials Technology (ITME) were tested. The compatibility between such inks and LTCC (Low Temperature Cofired Ceramics) substrates was especially an object of interest. The investigations were performed at Wrocław University of Technology, Warsaw University of Technology or Dresden Technical University. The path&#8217;s resolution, inks shrinkage as well as chosen electrical and mechanical properties (electrical resistivity, solderability, adhesion, shear resistance) were determined. Fabrication The photoimageable films were made using standard screen-printing combined with photolithography [3]. A special ink was screen- printed onto the substrate (Fig. 1a). The investigated pastes had good UV-resistance and using of UV-filters was unnecessary [4]. However, they need large amount of radiation during exposing. A proper photomask caused that only selected areas of ink were polymerized by UV light (Fig. 1b). The Hibridas Exposure Unit MA-4K were used. Remaining areas stayed unpolymerized and it was possible to remove them in the next technological step - spraying with proper developing solution (Fig. 1c). The Hibridas Developer Unit SC-4K and ethanolamine solution were used. As a result pattern from the photomask was transferred onto the substrate. The last technological step was firing of achieved layer in t[...]
 
Sensor for the measurement of combustion heat
 
ZBIGNIEW MAGOŃSKI  
Fluid fuels are widely used for motor powering, heating and cooking. Possibility of verification the quality of fuels is of paramount importance because fuel quality directly influences on consumption, and this way on customer charges. On the other hand, evaluation the quality of fuels, especially fuel heat energy, is a long time consuming process, which can be completed at laboratory site with a specific equipment. Proposed sensor can be a foundation for construction of simple portable instrument, which can be considered as an alternative to the expensive and bulky bomb calorimeter. Method of measurement The principle of measurement is explained in Fig. 1. A small volume stable flame is maintained between two ceramic plates, which temperature is being controlled by two thin film platinum resistors deposited on the both ceramic plates. These resistors serve as heaters and temperature sensors. The resistors are connected to electronic circuitry, which maintains a constant temperature of the both ceramic plates regardless of external or internal conditions. It is also assumed that the both ceramic plates display sufficiently high thermal conductivity that the same single value of temperature can be considered for each small portion of both ceramic plates. The temperature of both ceramic plates is maintained at constant temperature level above 800°C. High temperature of combustion zone is essential for performance, because the flame is not quenched in the vicinity of hot ceramic plates and thus a stable burning process can be maintained very close to the ceramic plates, so, the heat exchange factor can be improved. As the additional amount of fuel enters the combustion zone, and is being burned additional amount of heat is produced. That heat flux mostly in form of infrared radiation is absorbed by the ceramic plates. In response, in order to maintain the constant temperature of ceramic plates, the control circuit decreases t[...]
 
Simulation and modelling of planar EMI/RFI Filters
 
Piotr RYDLICHOWSKI  WOJCIECH BANDURSKI  
In th e paper discussion and analysis of the new prototypes of the planar lowpass power filters is presented. Basic structure is shown in Fig. 1 (not in scale). In [2] variations of considered basic structure are proposed and analyzed. Presented in [2] alternative structures were expected to provide information needed for accurate and efficient numerical and analytical simulation. Target application of discussed structures is suppression of RF-EMI interference in power electronic devices. Such interferences are found primarily in integrated high power converters (power densities 13 W/cm3 and above). Interferences are also induced by electromagnetic coupling between electronic devices during switching and by inductance and capacitance in electronic devices and in module package. Popular technologies used in aerospace industry prefer filters structures that are integrated (for convenience) with coaxial cables. Together with new devices and technologies a need has occur to design new, small, planar lowpass filter for Integrated Power Electronic modules (IPEMs). Such modules with kilowatt powers and high power densities can emit significant RF-EMI interferences. Proposed filters for radio frequency (RF) modules should satisfy three main prerequisites: 1) because structure should be physically small the speed of electromagnetic wave must be reduced to fraction of its free-space velocity value, 2) structure should be electrically and mechanically able to handle power from 1 kW to 10 kW at 300 V to 500 V and 30 A, 3) filter cut-off slope should be as steep as possible (e.g., > 40 dB/decade). Prototype structure described in [1] satisfies specified above requirements. Manufacturing technology of this kind of filters and experimental measurements of the amplitude characteristics are presented and discussed. Amplitude characteristics a[...]
 
State minimization by means of incompatibility graph coloring
 
ROBERT CZERWIŃSKI  DARIUSZ KANIA  
The mathematical model of a sequential circuit is a Finite State Machine (FSM). A Finite State Machine is generally defined as a five-tuple: {X, Y, S, &#948;, &#955;}, where: X is a finite input alphabet, Y is a finite output alphabet, S is a finite set of states, &#948; is the transition function, and &#955; is the output function. The transition function of an FSM determines the next state of the automaton (S+), and the output function determines outputs. The structure of the FSM is presented in Fig. 1. Internal states of an FSM are given mostly symbolic values. FSMs can be represented by a State Transition Table (STT). Every row of an STT corresponds to a transition between two states of the machine. The rows are divided into four columns corresponding to the primary inputs, present states, next states, and primary outputs (the kiss format). The rows of a STT are called symbolic implicants. An example of a state transition graph, with a corresponding STT, is presented in Fig. 2. Fig. 1. The structure of an FSM Rys. 1. Schemat blokowy układu sekwencyjnego Fig. 2. A state transition graph and a corresponding STT Rys. 2. Graf przejść automatu z odpowiadającą mu tablicą przejść-wyjść X Y S Clk S+ s1 1/01 s2 0/10 0/11 1/00 1 s1 s1 01 0 s1 s2 11 0 s2 s2 10 1 s2 s1 00 S+ X S Y Podsumowanie W artykule przedstawiono układ sterowanego cyfrowo aktywnego oscylatora harmonicznego, w którym jako elementy inercyjne wykorzystano dwa popularne wzmacniacze operacyjne TL081. Badania prezentowane w pracy motywowane były potrzebą poszukiwania rozwiązań układowych dla tego typu obwodów. Zaletą prezentowanego w pracy obwodu jest zapewnienie możliwości cyfrowego przestrajania jego parametrów (zarówno częstotliwości jak i amplitudy). Układy projektowane w oparciu o prezentowaną w pracy koncepcję teoretyczną m[...]
 
Surface morphology study and dielectric properties of polyesterimide nanocomposite
 
BARBARA GÓRNICKA  ANDRZEJ SIKORA  DAMIAN WOJCIESZAK  
It is now well known that nano-structuring of composites affect significantly on their dielectric properties as well the surface morphology [1-6]. On the other hand, the new generation of dielectrics, i.e. polymers modified with nanofillers, due to their special structure may influence on a better understanding of the phenomena that appear in dielectrics [1]. The polyesterimide impregnating varnish (T) have been modified by incorporation of hydrophilic fumed nanosilica (SiO2) at a low loading (1.5% by weight) using our special method. The influence of nanostructuring of composites on the thermally stimulated depolarization currents, temperature characteristic of tan &#948;&#61472; and&#61472; partial discharges resistance as well the nanoscale surface morphology were investigated. Experimental The thermally stimulated depolarization current (TSDC), partial discharge (PD) resistance, temperature characteristic of tan &#948; and surface morphology have been investigated for both pure (T) and nanofilled (T+ SiO2) varnishes. In the thermally stimulated depolarization current (TSDC) investigation at 120oC, a static voltage 100 V and 200 V was applied to a sample for a time 40 minutes and then temperature was decreased for a time 20 min to ambient temperature. The voltage was switched off and the sample was shortcircuited for a time 30 min to eliminate the rapid space charge relaxation and stabilize the sample. Then during a linear temperature increase 2 oC/min, the return to equilibrium of the previously oriented charges generated a depolarization current which was recorded, as a function of temperature, with a electrometer (Keithley 6517[...]
 
Syntezer sygnałów złożonych na bazie układów FPGA
 
MARIUSZ ŁUSZCZYK  
Jednym z technicznych kierunków rozwoju urządzeń radarowych jest cyfryzacja toru nadawczo-odbiorczego przejawiająca się w stosowaniu półprzewodnikowych modułów nadawczo- odbiorczych pracujących z cyfrowo generowanymi sygnałami złożonymi, cyfrowymi układami kompresji impulsów (w przypadku urządzeń pracujących z sygnałami impulsowymi) oraz cyfrowymi układami sterowania i korekcji wiązki antenowej w przypadku platform lotniczych [11]. Zalety cyfryzacji wybranych elementów toru nadawczo-odbiorczego to przede wszystkim większa niezawodność układów, większa powtarzalność charakterystyk elektrycznych, mniejsza podatność na zakłócenia, możliwości kształtowania i korekcji charakterystyk fazowych całego toru oraz łatwiejszy sposób zapewnienia zgodności interfejsów w przypadku transmisji sygnałów cyfrowych. Przetwarzanie sygnałów w technice SAR wymaga bardzo wysokiej stabilności krótkookresowej sygnałów i zapewnienia pełnej koherencji. Realizacja tych wymagań jest łatwiejsza do realizacji w układach cyfrowej syntezy sygnałów połączonych i synchronizowanych z układami czasosteru. Ze względu na postęp w dziedzinie elektroniki cyfrowej zwłaszcza w zakresie układów programowalnych, układów pamięci oraz układów konwersji cyfrowo-analogowej i analogowo- cyfrowej dokonuje się przełom w projektowaniu układów syntezerów cyfrowych oraz układów filtracji dopasowanej i detekcji fazy [3]. Najczęściej wykorzystywanym sygnałem w urządzeniach radarowych, w tym także w urządzeniach typu SAR jest sygnał z wewnątrzimpulsową modulacją częstotliwości (LFM). Sygnał LFM ma kwadratową charakterystykę fazową oraz liniową (w funkcji czasu) charakterystykę modulacyjną. Podstawowym parametrem sygnału jest jego baza, którą wyznacza się jako iloczyn szerokość widma sygnału (dewiacja) oraz czasu trwania impulsu. Baza łączy ze sobą dwa podstawowe parametry sygnału, ale należy pamiętać, że energia sygnału uzależniona jest od czasu trwania sygnału, zaś rozdzielczość [...]
 
System odtwarzania cyfrowych sygnałów elektroakustycznych
 
ARKADIUSZ HULEWICZ  MARCIN KUPSIK  
W dobie intensywnego rozwoju technologicznego oraz wzrastającej liczby systemów pomiarowych, w których nośnikiem danych jest dźwięk, ważną rolę w ocenie pozyskanych sygnałów odgrywa sposób ich archiwizacji oraz odtwarzania. Z opracowanych dotąd metod umożliwiających archiwizację i odtwarzanie sygnałów dźwiękowych, najczęściej wykorzystywana była metoda oparta na przetwarzaniu sygnałów analogowych [16]. W sygnałach tych analizie poddawano parametry magnetyczne, elektryczne lub mechaniczne, które po odpowiednim przetworzeniu umożliwiały odtwarzanie wybranych dźwięków. Systemy te charakteryzowały się wysokim poziomem zakłóceń i szumów oraz wysoką wrażliwością nośników danych, które z upływem czasu ulegały degradacji. Właściwości te spowodowały, że analogowe systemy archiwizacji dźwięku zostały zastąpione nośnikami cyfrowymi. Rozwój cyfrowych systemów przetwarzania danych znacznie poprawił jakość rejestracji i archiwizacji sygnałów dźwiękowych [13, 14, 15]. Cyfrowy zapis dźwięku zdominował przemysł fonograficzny po wprowadzeniu płyt kompaktowych, co miało miejsce w latach osiemdziesiątych XX wieku. Technologia cyfrowa charakteryzuje się wysoką odpornością na zakłócenia i szumy oraz dużą wytrzymałością nośników, co doprowadziło do zaniechania zapisu dźwięku dotychczas wykorzystywanymi metodami analogowymi [3, 5, 6]. Przedstawione w artykule metody cyfrowej rejestracji i archiwizacji sygnałów dźwiękowych zostały wykorzystane w opracowanym przetworniku, umożliwiającym odtworzenie zarejestrowanych danych z określoną dokładnością. Opracowany przetwornik pozwala na współpracę z komputerem, a charakteryzuje go wysoka jakość generowanego dźwięku. W ramach przeprowadzonych badań zweryfikowano parametry zbudowanego przetwornika oraz porównano je z parametrami urządzeń dostępnych na rynku. Podczas badań wykorzystano program RightMark Audio Analyzer 6.2.3. Cyfrowe przetwarzanie sygnałów dźwiękowych Z przetwarzaniem analogowo-cyfrowym zw[...]
 
System setup and software for impedance spectroscopy measurements
 
TOMASZ PIASECKI  MATEUSZ WROŃSKI  MARCIN DUDEK  KAROL NITSCH  
The impedance spectroscopy (IS) is one of the methods for investigation of electric material properties such as electric properties, the corrosion, performance of passive electronic devices or gathering information about the structural properties of materials or complex composites [1-3]. IS relies on the measurement of impedance performed in the frequency range of several orders of magnitude. Impedance is measured by applying small electromagnetic signal to the object under investigation and measuring the response. If the excitation is sinusoidal and object is linear the response is also sinusoidal. The impedance Z is the complex number representing both magnitude and phase shift of the response. (1) where U and I are the magnitudes of voltage and current, j&#969;&#966;U, j&#969;&#966;I are the phases of voltage and current and &#969; is the radial frequency. The factors which have to be taken under account during the measurement are the proper definition of sample&#8217;s shape and stable electrical contacts as the measurements may take long time. The range of frequencies used is also important. In some cases it has to be very wide to allow to detect all phenomena occurring in the sample. System setup To fulfill the requirement of the wide range of possible frequencies at which the measurements are performed the authors built impedance measurement system based on two impedance analyzers: Agilent 4294A and Solartron FRA 1260. Agilent 4294A is a fast, precise, high frequency impedance analyzer which is able to measure impedance from 40 Hz to 110 MHz. While on the other hand[...]
 
Temperature control for disposable lab-on-chip microsystems
 
JERZY KALENIK  KONRAD KIEŁBASIŃSKI  KRYSTIAN KRÓL  
The rapid development of lab-on-chip microsystems for chemical or biochemical analysis have taken place for last years. Many of analytical reactions should be carried out at defined temperature so they need temperature stabilization. The microsystems for biochemical analysis of human fluids should be disinfected thoroughly or used only once. The disposable parts of microsystem need to be very simple, cheap and environment friendly because of the large number of these components applied and disposed, for example microsystems for dialysis monitoring. The aim of this work was to elaborate very simple, cheap and environment friendly system for temperature stabilization of disposable postdialysate fluids analysis microsystem. Temperature measurement methode for lab-on-chip application In typical temperature control applications two separate elements are used - heater and temperature sensor. The disadvantage of such approach in microsystem technology is necessity of applying tw[...]
 
The analysis of detection possibility of optical radiation pulse with thermal method
 
ZBIGNIEW SUSZYŃSKI  MICHAŁ BEDNAREK  
The purpose of active thermography is to detect thermal heterogeneities or excitation energy distribution by measuring the temperature disturbance at the surface of the examined object in frequency or time domain. The variable component of temperature for the harmonic excitation can be obtained as a product of the power of excitation and thermal impedance of the object (1): T(&#969;) = P(&#969;) &#183; Z(&#969;) (1) In the case of thermally heterogeneous object, excited by a power P(&#969;), with thermal properties represented by its thermal diffusivity &#945; and thermal effusivity &#949;, reaches at the surface temperature described by the function T(&#969;). The values of temperature response (amplitude and phase) for frequencies of excitation spectrum carry information about the type and location of the thermal heterogeneities. Reconstructing the thermal properties distribution of the object basing on the temperature response measurements is possible if the function P(&#969;) describing the power of the excitation energy is known. In the general case the optical excitation is characterized by varied optical and frequency spectra. Spectral character of thermal impedance causes that the temperature response, and hence the temperature contrast of thermal heterogeneity, significantly depend on the frequency spectrum of the excitation pulse. It would be ideal if the excitation spectrum was correlated with the thermal impedance spectrum, which can be determined if the thermal properties of the object are known. In active thermography the excitation energy is usually performed by using optical radiation. That is why the frequency spectrum of excitation can be optimized by modulating its intensity in time. This can be realized by using choppers (mechanical modulation) or by changing the supply current (semiconductor lasers, filament lamps, etc.). In case of pulsed sources (flashlight, laser pulse) the excitation spectrum can be[...]
 
The MPW service development
 
DARIUSZ OBRĘBSKI  KRZYSZTOF KUCHARSKI  DANIEL TOMASZEWSKI  HELENA KŁOS  
The entire work spent for MPW service development can be split into three main parts related to three groups of activities: process characterization, process design kit (PDK) development and logistics issues. The process characterization part, which is the starting point, focuses on measurements of process parameters (e.g. sheet resistance of interconnect layers) as well as parameters of all silicon devices available (e.g. models of all transistor types). Special test structures, dedicated for given sets of parameters are also designed and manufactured at this stage. The second set of activities focuses on development of all necessary data files, as well as programs and procedures which are essential to run chosen CAD tools. In our case we decided to develop ITE Process Design Kit (IDK) for CAD tools from Cadence Design Systems (CDS), as the most popular one in academia community. The only exception is synthesis, which has been implemented using Synopsys DC. The aim of last group of activities was to establish all mechanisms which are needed to run MPW service. The C3P1M2 CMOS process The basis of ITE MPW service is ITE&#8217;s proprietary CMOS process, named C3P1M2, which was developed for the purpose of ASICs manufacturing. Its key features are: single p-well, one polysilicon layer, two metalization layers. The standard process requires 12 levels of photolithography. Main structural parameters of C3P1M2 process are collected in Table 1. Process characterization The prerequisites for PDK development are parameters of technology layers specific for given process and models of silicon devices available. Process characterization stage is devoted to acquiring these data. Measurement tools The Keithley system 93 I-V, controlled by METRICS [4] software was the essential tool used for silicon devices characterization. To enable the semi-automatic measurements, it was combined with ELECT&#8209;2002 [5] system, which controls mea[...]
 
Thermal stability of SiC MOS transistors
 
WITOLD J. STEPOWICZ  
Progress in the improvement of technical data of SiC devices is observable, however it is under expectation arising from theoretical considerations. Especially it concerns the maximum (allowable) junction temperature, what results, among other things, from difficulties to construct reliable metal - semiconductor contacts and reliable cases for SiC devices provided for operation, after some forecasts, up to 800oC. It was demonstrated [1] that for SiC MOS transistors and other SiC devices an additional thermal limitation has to be taken into consideration. This limitation results from self-heating phenomenon included in the dc model of the SiC MOS transistor. In [2] the same limitation was described for the silicon MOS transistor. The aim of this paper is to discuss the above-mentioned additional limitation of the temperature operation range of the SiC MOS transistor, resulting from its thermal stability, when the considered device operating in the linear region of its dc characteristics is supplied from the constant current source. S-type And N-type DC characteristics of semiconductor devices As known, the dc characteristics i (u) of some semiconductor devices can have their shape of the S-type or N-type as shown in Fig. 1. It can be caused by many electrical and thermal phenomena taken into account when these characteristics are derived. One of this phenomena is self-heating which causes that the junction (inner) temperature of a device differs from the ambient temperature due electrical power dissipated and non-ideal conditions of removing the heat from the device to surroundings. The dc characteristics with self-heating taken into consideration are oft called as the non-isothermal ones. For any device with the dc non-isothermal charac[...]
 
Veterinary and medical lab-on-a-chip - based point of care diagnostic devices with optical detection
 
RAFAŁ WALCZAK  
The decrease of world microsystem (MEMS) market observed in years 2008 and 2009 and caused by world crisis has been minimized due to rapid growth of microfluidical devices market for in vitro diagnostic (IVD). Microfluidical IVD is usually realized by application of lab-on-chips (LOCs) and point-of-care devices. According to Yole Developement&#8217;s recent roadmap of world LOC market for medical and life sciences applications, IVD LOC market was estimated to reach about 1 B$ in 2010, whereas in 2012 it will be doubled to the level of 2 B$ [1]. Total number of soled units of LOC in year 2010 was estimated to be about 177 millions whereas in 2015 it will be over 780 millions units. This 4-times increase of number of the fabricated and soled LOC units, as well as almost 20% of average annual growth rate of the market, cause that LOC IVD market is one of the leading application fields of global MEMS market. Value of IVD LOC world market in 2015 will be comparable to &#8220;killer" products of MEMS industry - miniaturized pressure sensors, gyroscopes or ink jet heads. It is predicted that IVD LOC will be a driving force of analytical microsystem market in the next two decades. Deeper analyze of this market leads to the conclusion that three main fields of applications dominate - human point-of-care devices, labs-on-chip dedicated for PCR and capillary electrophoresis for both - medical and veterinary - applications. One of the important issues involved in successful application of LOC in IVD is detection method and instrumentation compatible in dimensions and costs with LOC. In this paper a brief review on miniaturized fluorometric instrumentation co-working with LOC will be discussed. An idea and technical realization of novel fluorometric readout instrumentation will be presented. Finally, brief review of complex LOC-based instruments developed under 6. FP OPTOALBCARD, 7. FP LABONFOIL as well as Polish MNS-DIAG/ APOZAR projec[...]
 
Warstwy zabezpieczające ogniw słonecznych nanoszone w niskiej temparaturze
 
KAZIMIERZ DRABCZYK  PIOTR PANEK  
Przyrządy półprzewodnikowe, jakimi są ogniwa fotowoltaiczne, muszą być zabezpieczone przed szkodliwym wpływem czynników zewnętrznych. Stosuje się do tego celu różnego rodzaju warstwy zabezpieczające. Obecnie najpopularniejsze warstwy zabezpieczające to wszelkiego typu polimery. Najczęściej stosuje się octan polietylenowo winylowy EVA (Ethylene-Vinyl-Acetate). Ogniwa słoneczne zabezpiecza się w postaci modułów, które powstają w procesie laminacji w podwyższonej temperaturze i w obecności próżni. Innym ważnym elementem modułu jest przednia szyba zabezpieczająca moduł mechanicznie. Szyba taka jest bardzo odporna mechanicznie (szkło hartowane), ale jednocześnie jest bardzo ciężka. Z tego powodu czasami jest ona eliminowana z modułu fotowoltaicznego. Zastępowana jest innym materiałem, na przykład blachą aluminiową na tylnej części modułu. Eksperyment Wszystkie badania dotyczące przedsta-wionych sposobów laminacji niskotempera-turowej przeprowadzono w Laboratorium Fotowoltaicznym Instytutu Metalurgii i Inżynierii Materiałowej PAN (LF IMIM PAN) w Kozach. Ogniwo referencyjne stosowane do pomiarów charakterystyk prądowo-napięciowych skalibrowano w Institute für Solarenergieforschung w Hameln Emmerthal (Niemcy). Typowy proces laminacji ogniw słonecznych składa się z 7 etapów, zależnych od stosowanej technologii, sprzętu oraz użytych materiałów. Natomiast prowadzone badania składały się z 4 zasadniczych kroków pokazanych na rys. 1. Materiałem bazowym użytym do badań w niniejszej pracy były:  płyty [...]
 
Wpływ domieszkowania Tb na zwilżalność i wolną energię powierzchniową cienkich warstw TiO2
 
DAMIAN WOJCIESZAK  DANUTA KACZMAREK  JAROSŁAW DOMARADZKI  EUGENIUSZ PROCIÓW  FRANK PLACIDO  JOHN KAVANAGH  MICHAŁ MAZUR  
Dynamiczny rozwój metod fizycznego osadzania PVD (Physical Vapour Deposition) związany jest z rosnącym w ostatnich latach zapotrzebowaniem na nanokrystaliczne powłoki, które posiadają nowe i odmienne właściwości w porównaniu do standardowych powłok. Szeroko prezentowane w literaturze przedmiotu przykłady możliwości zastosowania tego typu powłok dotyczą głównie takich tlenków metali jak TiO2 [1-10], SnO2 [11], czy ZnO [12]. Materiały te są dobrymi kandydatami do wytwarzania tzw. powłok funkcjonalnych, których właściwości mogą być modyfikowane, między innymi, przez selektywne domieszkowanie [1, 10, 11]. Z punktu widzenia zastosowań pożądane są powłoki o wysokiej przezroczystości [1, 8], wysokiej aktywności fotokatalitycznej [2, 6], podwyższonej twardości [3, 8], czy też o odpowiednich właściwości elektrycznych [3, 11, 12]. Oprócz tego istnieje zapotrzebowanie na powłoki o określonej zwilżalności powierzchni, czyli tzw. powłoki hydrofilowe oraz hydrofobowe [7, 9]. Są to warstwy o odpowiednio wysokim lub niskim stopniu zwilżalności powierzchni przez wodę. Zwłaszcza wytwarzanie warstw na bazie tego samego materiału, które mają różny stopień zwilżalności jest atrakcyjne z punktu widzenia zastosowań w przemyśle. W pracy przedstawiono analizę wyników pomiarów zwilżalności nanokrystalicznych cienkich warstw TiO2. Właściwości matrycy były modyfikowane przez domieszkowanie terbem. Elektronika 3/2011 77 Zwilżalność powierzchni cienkich warstw TiO2 badano w celu określenia wpływu domieszkowania terbem na termodynamiczne właściwości powierzchni warstw. Dwutlenek tytanu został wybrany jako matryca z uwagi na wysoki stopień przezroczystości w zakresie widzialnych fal świetlnych, odmienne właściwości w zależności od typu struktury krystalicznej, nietoksyczność i wysoki st[...]
 
Zmiany w modelach i technologiach informacyjnych w dobie Web 2.0 i Web 3.0
 
JOLANTA BRZOSTEK-PAWŁOWSKA  
Zapoczątkowana przed kilku laty pojawieniem się pierwszych portali społecznościowych i udostępnianych na nich aplikacji, dziś zwanych aplikacjami społecznymi lub technologiami Web 2.0, rewolucja informacyjna w krótkim czasie zmieniła model informacyjny Internetu z modelu statycznych stron WWW niosących informacje na model interaktywnego udziału użytkowników tworzących strumienie informacji w czasie rzeczywistym. Web czasu rzeczywistego jest nową formą komunikacji zwiększającej o rząd szybkość informacji. Technologie Web 2.0 i szybkość komunikacji wpłynęły na zmiany w modelach informacyjnych realizowanych przez systemy, ponieważ zmieniły się postawy, potrzeby i oczekiwania użytkowników. Zjawisko społecznej wiedzy spowodowało inne podejście do zarządzania wiedzą - jej gromadzenia i dystrybucji. Dziś informacja adekwatna do potrzeb musi natychmiast dotrzeć tam, gdzie znajduje się użytkownik, przede wszystkim na stanowisko pracy, stacjonarne lub mobilne, aby zwiększyć wydajność pracownika. Aby informacja była najbardziej wartościowa i najlepiej dostosowana do kontekstu, w jakim pojawiła się jej potrzeba, to z jednej strony mechanizmy wyszukiwania muszą obejmować jak najwięcej źródeł informacji, z drugiej strony informacje muszą być trafnie, wieloaspektowo opisane. Coraz doskonalsze technologie Web 3.0 mają za zadanie dostarczać wiedzę inteligentnie, czerpiąc ją również ze źródeł społecznych. Inteligentna dystrybucja wiedzy bazuje m.in. na szczegółowym opisie semantycznym gromadzonych informacji, jak również na wnikliwej analizie danych otrzymywanych od użytkownika, czemu służą tzw. semantyka Web 3.0, jak i mechanizmy sztucznej inteligencji. W artykule przedstawiono wpływ Web 2.0 na zmianę postaw i potrzeb użytkowników, na zmianę modeli biznesowych i systemów informacyjnych oraz przedstawione zostaną główne kierunki rozwoju technologii Web 3.0, wychodzących tym zmianom naprzeciw. Charakterystyka Web 2.0 Web 2.0, zwana też siecią[...]
 

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