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» Design and realization of a microfluidic capillary sensor based on a silicon structure and disposable optrodes
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Zbigniew Szczepański  Michał Borecki Dariusz Szmigiel Michael L. Korwin Pawlowski
During the last years microfluidic sensors that use optical capillaries
have gained an increasing importance due to their new
applications as diagnostic tool in biotechnology, medicine and in
environmental sciences. This was possible because the capillary
enables multiparametric sensing [1-7] contrary to the classical
optical fiber sensors [8], which find applications in physical measurements
such as pressure and also magnetic field [9].
In this paper the improvements in the design of microfluidic
sensors that use local heating in optical capillaries as a base
of multiparametric diagnostics is presented [4]. The application
of local heating opened interesting new possibilities for the
sensors, that do not use any chemical sensitive layers or reagents,
while raising specific issues relating to their construction,
materials and technology [5]. The mentioned sensors can be
used for in situ diagnostic in medicine and veterinary and as
biofuel usability testers [10-12].The proposed microfluidic capillary
sensor consists of a stabilized-intensity light source unit,
a testing head with replaceable optical capillary, a heater and
a detection unit. The optical capillary performs the functions of
a liquid sample holder and at the same time of a multiparametric
sensing element. The sensor operates in a multiparametric sensing
mode, monitoring, registering and processing the indirect
information such as the index of refraction, the boiling point,
the vapour pressure, the heat capacity, the heat of fusion, the
viscosity, the surface tension of the liquid and turbidity changes
in a thermally forced measuring cycle. The measuring cycle is
initiated by applying local heating to the sample [5]. The measuring
cycle is controlled indirectly by changes in optical signals
and temperatures [10]. The raw optical data are processed
by an optoelectronic ci[...]
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ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA 2012/1
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» Rapid prototyping of electrostatically-driven MEMS
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STANISŁAW KALICIŃSKI PAWEŁ JANUS TOMASZ BIENIEK KRZYSZTOF DOMAŃSKI MAGDALENA EKWIŃSKA ANDRZEJ SIERAKOWSKI DARIUSZ SZMIGIEL PIOTR GRABIEC
In general, design and manufacturing of MEMS is a complex,
expensive and time consuming process. Usually, it requires
a number of iterative steps for verification of initial concepts
and for determination of the properties of structural materials
[1]. This process has been significantly boosted by several
commercial MEMS design and simulation software tools that
have been developed in the last decade, such as COVENTORWARE
® or INTELLISENSE® [2, 3].
Still, when using such software, it is very difficult to combine
electromechanical properties of MEMS devices with electrical
properties of semiconductors. In this case, a classical
scheme, namely with a standard manufacturing cycle: design,
fabrication, testing may be the only feasible one. For complex
designs, this may cause long times to market.
In this paper we present a very simple approach that[...]
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ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA 2010/6
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» Design and manufacturing of heterogeneous microsystems for micro- and nanotechnology applications
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PAWEŁ JANUS KRZYSZTOF DOMAŃSKI MAGDALENA EKWIŃSKA TOMASZ BIENIEK STANISŁAW KALICIŃSKI ANDRZEJ SIERAKOWSKI RAFAŁ DOBROWOLSKI DARIUSZ SZMIGIEL PIOTR PROKARYN PIOTR GRABIEC
The potential and growth of microsystem require integration of
mechanical, electrical, optical and many more domains within
the small dimensions associated with very large scale integration
(VLSI). The behavior of the overall system is not just
the simple connection of separate mechanical and electrical
behaviors, but the simultaneous combination of mechanical,
electrical and optical behaviors. The integration of modern
MEMS has to be considered on various levels:
- materials used for microsystem construction,
- processes used for fabrication of the system,
- mechanical and electrical properties of the elements of microsystem,
- function of overall integrated microsystem including packaging.
Therefore modern tool for multi-domain, heterogeneous
microsystem modeling and simulation has to allow the designer
take into account all these aspects of integration.
Modern methodology of MEMS design presented in this
paper is based on a system-level, top-down MEMS design
process [1]. The objectives of this method are to optimize
the function of the devices and to minimize development
time and cost by avoiding unnecessary design cycles and
foundry runs.
This methodology (Fig.1a) uses
an initial set of MEMS re quirements
to select a design and fabrication
approach. Instead of using a layoutdrawing
tool to create a 2D model,
high-level design techniques use
a graphical schematic capture tool
to position and connect the model
symbols that represent functional
blocks (masses, plates, electrodes
or micro-fluidic parts) with underlying
analytical formula. Because the
simulations are run using code-based,
six Degree-Of-Freedom (DOF)
behavioral models, instead of FEM
based or BEM-based partial differential
equation models, the simulation
time is reduced by orders of
magnitude. Once the design is complete
a device layout can be generated
automatically from the high level
description. In next step, 3D PDE
Design and manufacturing of h[...]
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ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA 2010/4
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» Integrated thermal probe for SThM investigation of micro- and nanoelectronic devices
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PAWEŁ JANUS DARIUSZ SZMIGIEL GRZEGORZ WIELGOSZEWSKI MARTIN WEISHEIT YVONNE RITZ PIOTR GRABIEC MARTIN HECKER TEODOR GOTSZALK PRZEMYSŁAW SULECKI EHRENFRIED ZSCHECH
Modern technology of micro/nanoelectronic components,
sensors and MEMS/NEMS (Micro/Nano-Electro-Mechanical-
Systems) requires increasingly the control of materials at the
sub-micrometer scale down to the nanometer scale. According
the ITRS roadmap for silicon-based semiconductor devices,
the power dissipation of chips exceeds 300 W, with localized
heat fluxes even above 500 W/cm2. Therefore, local thermal
properties of the involved structures are of high interest; and
sub-100 nm resolution is required for most of the studies. Particularly,
the heat transfer phenomena, including e.g. phonon
heat conduction mechanisms in micro- and nanostructures,
have to be understood since they differ significantly from that
on the macroscale.
The invention of the scanning tunneling microscope (STM)
[1] and the atomic force microscope (AFM) [2] have allowed
sub-micrometer and even atomic scale spatially resolved
imaging of surfaces. The spatial resolution of these near-field
techniques is only limited by the active area of the sensing
tip (which in the case of STM may only be a few atoms at the
end of a metal wire). As described by Dinwiddie and Pylkki in
1994, first scanning thermal microscopy (SThM) probes employed
resistance thermometry to measure thermal properties
[3]. These probes were fashioned and made from Wollaston
wire consisting of a thin platinum core (ca. 5 μm in diameter)
surrounded by a thick silver sheath (ca. 75 μm). Because of its
high endurance, the Wollaston probe is attractive for microsystem
diagnostics [4, 5], however the active area in the range
of a few micrometers does not fulfill the requirements regarding
spatial resolution and quantitative thermal properties for
micro- and nano-scale components.
In this paper we propose a novel AFM cantilever combined
with a SThM resistive tip. Moreover, the technology sequence
developed for manufacturing of AFM/SThM probes offers
highly reproducible, cost-effective b[...]
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ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA 2010/6
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» Modelowanie i wytwarzanie mikrosystemów dla zastosowań w chemii i diagnostyce biomedycznej
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Krzysztof DOMAŃSKI Anna BARANIECKA Magdalena EKWIŃSKA Paweł JANUS Piotr PROKARYN Andrzej SIERAKOWSKI Dariusz SZMIGIEL Michał ZABOROWSKI Piotr GRABIEC
W artykule przedstawiono procesy technologiczne mikroinżynierii krzemowej wykorzystane do wytwarzania przyrządów
opracowywanych w ramach projektu MNS-DIAG. Kluczowymi procesami dla wytwarzania opracowywanych w ramach tego projektu demonstratorów
są: głębokie plazmowe trawienie podłoża krzemowego, procesy łączenia płytek podłożowych z innymi płytkami krzemowymi, ceramicznymi lub
szklanymi, procesy elektrochemicznego osadzania metali szlachetnych oraz procesy nakładania i kształtowania warstw polimerowych.
Abstract. The development of silicon technology over the last few decades has enabled production of complex integrated circuits and has also
contributed to the development of microsystems containing sensors, actuators, and signal processing circuits. Currently, microsystems based on
silicon technology, complemented by processes specific to MEMS technology, are widely used in both automotive as well as in chemistry, biology or
medicine. The paper presents processes used to manufacture silicon microsystems developed in the fame of the project “Microsystems for biology,
chemistry and medical applications". The project goal is to develop a range of biomedical devices and chemical sensors: lab on a chip for
determination of psychotropic drugs in saliva samples, diagnostic instruments for analysis of body secretion for fertility and pathological states
monitoring, diagnostic instruments for evaluation of bovine embryos, microreactors for cell culture, arrays of chemical sensors for detection of Gramnegative
bacteria and MEMS for medical diagnostic equipment. Key manufacturing processes used for fabrication of these devices are: deep plasma
etching of silicon substrate, bonding of silicon, ceramic or glass substrates, electrochemical deposition and patterning of noble metals and coating
and patterning of polymer layers on silicon and glass substrates. (Preparation Modeling and manufacturing of microsystems for applications in
chemistry and bio[...]
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PRZEGLĄD ELEKTROTECHNICZNY 2010/10
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» Mikroprzepływowe immunoczujniki z detekcją amperometryczną
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ANNA BARANIECKA MARIANNA GÓRSKA MICHAŁ ZABOROWSKI PIOTR PROKARYN RAFAŁ SZCZYPIŃSKI KARINA SKWARA DARIUSZ SZMIGIEL ANDRZEJ SIERAKOWSKI MAREK NIEPRZECKI WALDEMAR MILCZAREK JAN M. ŁYSKO DOROTA G. PIJANOWSKA PIOTR GRABIEC
W przypadku nowoczesnych urządzeń analitycznych, takich
jak bioczujniki bardzo istotnymi cechami są: niski koszt pojedynczego
testu, jak najkrótszy czas w którym można uzyskać
wyniki, wielofunkcyjność, duża czułość oraz możliwość analizowania
złożonych próbek. Można to uzyskać poprzez zastosowanie
układu mikroprzepływowego, amperometrycznego
systemu detekcji oraz analitycznych technik immunoenzymatycznych,
takich jak ELISA (Enzyme-Linked Immunoassay),
czy ELISPOT (Enzyme-Linked Immuno-Spot Assay) [1].
W przypadku detekcji amperometrycznej najczęściej
używane są immunoglobuliny z klasy G (IgG) znakowane enzymami,
takimi jak: fosfataza alkaliczna, peroksydaza, katalaza,
laktaza i galaktozydaza.
Istnieje szeroki wybór testów ELISA nadający się do aplikacji
w czujnikach do oznacz[...]
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ELEKTRONIKA - KONSTRUKCJE, TECHNOLOGIE, ZASTOSOWANIA 2009/12
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» Technologia wytwarzania układu mikroprzepływowego do amperometrycznego pomiaru stężenia kwasu askorbinowego
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Anna BARANIECKA Marianna GÓRSKA Beata KAZIMIERCZAK Dariusz SZMIGIEL Rafał SZCZYPIŃSKI Filip ILNICKI Jerzy KRUK Władysław TORBICZ Dorota G. PIJANOWSKA Piotr GRABIEC
W niniejszym artykule zaprezentowano układ mikroprzepływowy do amperometrycznego oznaczania stężenia kwasu L-askorbinowego.
Podczas projektowania układu wykorzystano symulacje komputerowe, wykonane za pomocą oprogramowania COMSOL. Do wytworzenia
układu zastosowano różne technologie m.in.: głębokie plazmowe trawienie krzemu w procesie Boscha, polimeryzację plazmową, miękką litografię z
zastosowaniem krzemowej matrycy i elastomeru PDMS, fotolitografię UV, magnetronowe katodowe napylanie cienkich warstw metalicznych,
technikę lift-off, oraz modyfikację elektrochemiczną powierzchni elektrod. W projektowanym układzie do testu immunoenzymatycznego ELISA z
wykorzystaniem fosfatazy alkalicznej jako markera, kwas askorbinowy będzie końcowym produktem reakcji enzymatycznej, którego oznaczanie
służy do określania w sposób pośredni stężenia istotnych w diagnostyce medycznej agalitów takich jak białko C-reaktywne, fibrynogen i troponiny.
Abstract. In this paper, a microfluidic system for L-ascorbic acid concentration measurement using the amperometric detection method is presented.
The system was developed basing on computer simulations obtained with software COMSOL. Different technologies and techniques such as: deep
silicon plasma etching in Bosch method, plasma polymerization, soft lithography with Si template and elastomer PDMS, UV lithography, magnetron
sputtering, lift-off and electrochemical surface modification were applied. L-ascorbic acid is electrochemically active compound. In the designed
system for immunoenzymatic test ELISA with alkaline phosphatase as an enzymatic label, this compound is a final product of enzymatic reaction. It
allows indirect electrochemical measurement of concentration of electrochemically inactive analytes, important in medical diagnostics, such as:
C-reactive protein, fibrinogen or troponins. (Technology of microfluidic system fabrication for amperometric measurement of ascorbic acid
concentration).
Słowa kluczowe: u[...]
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PRZEGLĄD ELEKTROTECHNICZNY 2010/10
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