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Basic electrical and optical properties of protective SiCx and SiNy layers

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First results of fundamental investigations of protective SiCx and SiNy layers concerning light transmission in the range 300 nm÷ 900 nm and electrical conductivity at the conditions of dc and transient currents are given in the paper. These investigations allow to determine the basic electrical and optical properties of covalentbonded Si-based coatings from the point of view of potential ind[...]

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